Inventor
RUCHA ULRICH
6 patents
Patents
6 patentsUS4148931AApr 10, 1979
Process for depositing elemental silicon semiconductor material from a gas phase
SIEMENS AG32 citations91
US4125643ANov 14, 1978
Process for depositing elemental silicon semiconductor material from a gas phase
SIEMENS AG41 citations91
US4255463AMar 10, 1981
Method of deposition of silicon in fine crystalline form
SIEMENS AG16 citations72
US4035460AJul 12, 1977
Shaped bodies and production of semiconductor material
SIEMENS AG8 citations72
US4034705AJul 12, 1977
Shaped bodies and production of semiconductor material
SIEMENS AG2 citations61
US4012217AMar 15, 1977
Bending silicon rods into U-shapes
SIEMENS AG5 citations56