Inventor
MINAGAWA TADAO
JP8 patents
⚠️ This page may combine multiple inventors who share the name “MINAGAWA TADAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
7 patentsUS5661744AAug 26, 1997
Excimer laser beam irradiation apparatus for optically processing workpiece
MITSUBISHI ELECTRIC CORP72 citations95
US5811754ASep 22, 1998
Optical processing method and apparatus for carrying out the same
MITSUBISHI ELECTRIC CORP75 citations94
US5187716AFeb 16, 1993
Excimer laser device
MITSUBISHI ELECTRIC CORP57 citations92
US5005181AApr 2, 1991
Method for controlling gas in halogen gas laser and device therefor
MITSUBISHI ELECTRIC CORP37 citations92
US4839767AJun 13, 1989
Element and device for detecting internal faults in an insulating gas charged electrical apparatus
MITSUBISHI ELECTRIC CORP9 citations72
US5876578AMar 2, 1999
Gas sensor
MITSUBISHI ELECTRIC CORP7 citations69
US4908729AMar 13, 1990
Lightning arrester monitor
MITSUBISHI ELECTRIC CORP1 citations49