Inventor
PEDERSON LESTER A
US4 patents
Patents
4 patentsUS4464460AAug 7, 1984
Process for making an imaged oxygen-reactive ion etch barrier
IBM27 citations91
US5432047AJul 11, 1995
Patterning process for bipolar optical storage medium
IBM9 citations71
US4398001AAug 9, 1983
Terpolymer resist compositions
IBM17 citations70
US4289573ASep 15, 1981
Process for forming microcircuits
IBM7 citations67