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Inventor
CHU HUAI-YUAN
TW
2 patents
Patents
2 patents
US7247247B2
Jul 24, 2007
Selective etching method
WALSIN LIHWA CORP
10 citations
81
US7088030B2
Aug 8, 2006
High-aspect-ratio-microstructure (HARM)
WALSIN LIHWA CORP
7 citations
70