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Inventor
PAQUETTE BRIAN
US
2 patents
⚠️ This page may combine multiple inventors who share the name “PAQUETTE BRIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SENSARRAY CORP
1 patent
US7135852B2
Nov 14, 2006
Integrated process condition sensing wafer and data analysis system
SENSARRAY CORP
79 citations
95
KLA TENCOR CORP
1 patent
US7855549B2
Dec 21, 2010
Integrated process condition sensing wafer and data analysis system
KLA TENCOR CORP
23 citations
91