Inventor
RHEEM BYEONG-KI
KR3 patents
Patents
3 patentsUS6202000B1Mar 13, 2001
Monitoring system for semiconductor device fabrication facility
SAMSUNG ELECTRONICS CO LTD14 citations66
US5856676AJan 5, 1999
Water-removing exhaust system for an ion implanter and a method for using the same
SAMSUNG ELECTRONICS CO LTD4 citations57
US6401003B1Jun 4, 2002
Alarm system for semiconductor device fabrication facility
SAMSUNG ELECTRONICS CO LTD1 citations45