Inventor
SABDE GUNDU
US4 patents
Patents
4 patentsUS6419554B2Jul 16, 2002
Fixed abrasive chemical-mechanical planarization of titanium nitride
MICRON TECHNOLOGY INC41 citations94
US6997781B2Feb 14, 2006
Fixed-abrasive chemical-mechanical planarization of titanium nitride
MICRON TECHNOLOGY INC6 citations71
US6881129B2Apr 19, 2005
Fixed-abrasive chemical-mechanical planarization of titanium nitride
MICRON TECHNOLOGY INC7 citations71
US7402094B2Jul 22, 2008
Fixed-abrasive chemical-mechanical planarization of titanium nitride
MICRON TECHNOLOGY INC0 citations50