Inventor
NONAKA RYO
JP16 patents
⚠️ This page may combine multiple inventors who share the name “NONAKA RYO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUS5997962ADec 7, 1999
Plasma process utilizing an electrostatic chuck
TOKYO ELECTRON LTD253 citations99
US6074518AJun 13, 2000
Plasma processing apparatus
TOKYO ELECTRON LTD276 citations98
US5914568AJun 22, 1999
Plasma processing apparatus
TOKYO ELECTRON LTD95 citations97
US6492612B1Dec 10, 2002
Plasma apparatus and lower electrode thereof
TOKYO ELECTRON LTD49 citations89
US7988062B2Aug 2, 2011
Temperature control device for target substrate, temperature control method and plasma processing apparatus including same
TOKYO ELECTRON LTD16 citations84
US7230202B2Jun 12, 2007
Plasma processing apparatus, electrode unit, feeder member and radio frequency feeder rod
TOKYO ELECTRON LTD9 citations74
US7005660B2Feb 28, 2006
Surface processing apparatus
TOKYO ELECTRON LTD8 citations73
US9330891B2May 3, 2016
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations48
ENPLAS CORP
3 patentsUSD778334SFeb 7, 2017
Lens for light emitting diode
ENPLAS CORP6 citations84
US10408417B2Sep 10, 2019
Light-emitting device with light flux control member having prismatic elements on bottom surface forming acute angle with side edge of light source
ENPLAS CORP3 citations72
US11022842B2Jun 1, 2021
Planar light source device and display device
ENPLAS CORP0 citations51