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Inventor
WEBB NICHOLAS E
US
2 patents
Patents
2 patents
US6846726B2
Jan 25, 2005
Silicon parts having reduced metallic impurity concentration for plasma reaction chambers
LAM RES CORP
18 citations
89
US7517803B2
Apr 14, 2009
Silicon parts having reduced metallic impurity concentration for plasma reaction chambers
LAM RES CORP
7 citations
70