Inventor

POON CHYIU-HYIA

SG4 patents

⚠️ This page may combine multiple inventors who share the name “POON CHYIU-HYIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHARTERED SEMICONDUCTOR MFG

2 patents

US6897118B1May 24, 2005

Method of multiple pulse laser annealing to activate ultra-shallow junctions

CHARTERED SEMICONDUCTOR MFG105 citations96

US7112499B2Sep 26, 2006

Dual step source/drain extension junction anneal to reduce the junction depth: multiple-pulse low energy laser anneal coupled with rapid thermal anneal

CHARTERED SEMICONDUCTOR MFG10 citations69

POON CHYIU HYIA

2 patents

US8324011B2Dec 4, 2012

Implementation of temperature-dependent phase switch layer for improved temperature uniformity during annealing

POON CHYIU HYIA4 citations58

US8912102B2Dec 16, 2014

Laser annealing

POON CHYIU HYIA0 citations45