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Inventor

MURTAGH MARTIN EDWARD

IE4 patents
⚠️ This page may combine multiple inventors who share the name “MURTAGH MARTIN EDWARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

3 patents
US7659979B2Feb 9, 2010

Optical inspection apparatus and method

KLA TENCOR CORP18 citations78
US7616307B2Nov 10, 2009

Optical measurement apparatus and method

KLA TENCOR CORP19 citations76
US7616308B2Nov 10, 2009

Optical measurement apparatus and method

KLA TENCOR CORP4 citations58

OPTICAL METROLOGY PATENTS LTD

1 patent
US7016044B2Mar 21, 2006

Optical measurement apparatus and method

OPTICAL METROLOGY PATENTS LTD10 citations65