Inventor
TAKAYAMA YUICHI
JP7 patents
Patents
7 patentsUS11521881B2Dec 6, 2022
Substrate treating apparatus
SCREEN HOLDINGS CO LTD2 citations70
US11850623B2Dec 26, 2023
Substrate treating apparatus and substrate transporting method
SCREEN HOLDINGS CO LTD1 citations60
US11948823B2Apr 2, 2024
Substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations59
US12424479B2Sep 23, 2025
Substrate reversing method with reversing mechanism
SCREEN HOLDINGS CO LTD0 citations57
US11967518B2Apr 23, 2024
Substrate treating apparatus and substrate reversing method
SCREEN HOLDINGS CO LTD1 citations57
US11081376B2Aug 3, 2021
Substrate processing apparatus, transfer module, and coupling module
SCREEN HOLDINGS CO LTD0 citations50
US12083563B2Sep 10, 2024
Substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations49