Inventor
VAN BOXMEER JOHAN MARIA
NL5 patents
⚠️ This page may combine multiple inventors who share the name “VAN BOXMEER JOHAN MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
4 patentsUS10488765B2Nov 26, 2019
Method of optimizing the position and/or size of a measurement illumination spot relative to a target on a substrate, and associated apparatus
ASML NETHERLANDS BV2 citations71
US7835017B2Nov 16, 2010
Lithographic apparatus, method of exposing a substrate, method of measurement, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV3 citations59
US7869022B2Jan 11, 2011
Inspection method and apparatus lithographic apparatus, lithographic processing cell, device manufacturing method and distance measuring system
ASML NETHERLANDS BV4 citations57
US10571363B2Feb 25, 2020
Method of determining an optimal focus height for a metrology apparatus
ASML NETHERLANDS BV0 citations47