Inventor

TAS MARNIX ALDERT

NL2 patents

⚠️ This page may combine multiple inventors who share the name “TAS MARNIX ALDERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SEMICONDUCTOR MFG

1 patent

US6733165B2May 11, 2004

Optical integrator for an illumination device

ZEISS CARL SEMICONDUCTOR MFG13 citations79

VAN BOXMEER JOHAN MARIA

1 patent

US8994921B2Mar 31, 2015

Scatterometer and lithographic apparatus

VAN BOXMEER JOHAN MARIA2 citations46