Inventor
MIYATANI KOTARO
JP5 patents
Patents
5 patentsUS6706334B1Mar 16, 2004
Processing method and apparatus for removing oxide film
TOKYO ELECTRON LTD95 citations96
US6776874B2Aug 17, 2004
Processing method and apparatus for removing oxide film
TOKYO ELECTRON LTD52 citations95
US8383519B2Feb 26, 2013
Etching method and recording medium
TOKYO ELECTRON LTD4 citations55
US8021975B2Sep 20, 2011
Plasma processing method for forming a film and an electronic component manufactured by the method
TOKYO ELECTRON LTD0 citations51
US9640388B2May 2, 2017
Method for forming insulating film and method for manufacturing semiconductor device
TOKYO ELECTRON LTD0 citations46