Inventor

SANAPALA RAVIKUMAR

US3 patents

Patents

3 patents

US9702827B1Jul 11, 2017

Optical mode analysis with design-based care areas

KLA TENCOR CORP8 citations80

US9518934B2Dec 13, 2016

Wafer defect discovery

KLA TENCOR CORP12 citations78

US10018571B2Jul 10, 2018

System and method for dynamic care area generation on an inspection tool

KLA TENCOR CORP0 citations36