Inventor
ANANTHA VIDYASAGAR
IN6 patents
Patents
6 patentsUS9714905B1Jul 25, 2017
Wafer inspection recipe setup
KLA TENCOR CORP8 citations77
US8948494B2Feb 3, 2015
Unbiased wafer defect samples
KLA TENCOR CORP6 citations70
US10692690B2Jun 23, 2020
Care areas for improved electron beam defect detection
KLA TENCOR CORP1 citations59
US9582869B2Feb 28, 2017
Dynamic binning for diversification and defect discovery
KLA TENCOR CORP0 citations39
US10018571B2Jul 10, 2018
System and method for dynamic care area generation on an inspection tool
KLA TENCOR CORP0 citations36
US10620134B2Apr 14, 2020
Creating defect samples for array regions
KLA TENCOR CORP0 citations35