Inventor
TSUKIHARA KOICHI
JP11 patents
⚠️ This page may combine multiple inventors who share the name “TSUKIHARA KOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SONY CORP
5 patentsUS6780692B2Aug 24, 2004
Laser annealing apparatus and method of fabricating thin film transistor
SONY CORP30 citations92
US7109435B2Sep 19, 2006
Beam irradiator and laser anneal device
SONY CORP18 citations83
US7154673B2Dec 26, 2006
Light irradiator
SONY CORP8 citations72
US11112345B2Sep 7, 2021
Microparticle measurement device and cleaning method for microparticle measurement device
SONY CORP0 citations62
US7820531B2Oct 26, 2010
Method of manufacturing semiconductor device, method of manufacturing display apparatus, apparatus of manufacturing semiconductor device, and display apparatus
SONY CORP6 citations61
UMEZU NOBUHIKO
3 patentsUS8168518B2May 1, 2012
Method for crystallizing thin film, method for manufacturing thin film semiconductor device, method for manufacturing electronic apparatus, and method for manufacturing display device
UMEZU NOBUHIKO3 citations60
US8193008B2Jun 5, 2012
Method of forming semiconductor thin film and semiconductor thin film inspection apparatus
UMEZU NOBUHIKO4 citations58
US8518756B2Aug 27, 2013
Method for crystallizing thin film, method for manufacturing thin film semiconductor device, method for manufacturing electronic apparatus, and method for manufacturing display device
UMEZU NOBUHIKO0 citations49
TSUKIHARA KOICHI
2 patentsUS8592713B2Nov 26, 2013
Irradiating apparatus, semiconductor device manufacturing apparatus, semiconductor device manufacturing method, and display device manufacturing method
TSUKIHARA KOICHI1 citations46
US8451536B2May 28, 2013
Irradiation apparatus and manufacturing method for semiconductor device
TSUKIHARA KOICHI1 citations46