Inventor

KERA YUKI

JP2 patents

Patents

2 patents

US11435666B2Sep 6, 2022

Salt compound, chemically amplified resist composition, and patterning process

SHINETSU CHEMICAL CO1 citations55

US11687000B2Jun 27, 2023

Sulfonium compound, chemically amplified resist composition, and patterning process

SHINETSU CHEMICAL CO0 citations48