Inventor
LEE KI YUNG
KR4 patents
⚠️ This page may combine multiple inventors who share the name “LEE KI YUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMES CO LTD
3 patentsUS11244837B2Feb 8, 2022
Process gas supply apparatus and wafer treatment system including the same
SEMES CO LTD0 citations58
US12315743B2May 27, 2025
Substrate treating method and substrate treating apparatus
SEMES CO LTD0 citations50
US11881382B2Jan 23, 2024
Apparatus and method for treating substrate
SEMES CO LTD0 citations49