Inventor
YANG SEUNG TAE
KR4 patents
⚠️ This page may combine multiple inventors who share the name “YANG SEUNG TAE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMES CO LTD
3 patentsUS12272544B2Apr 8, 2025
Apparatus for treating substrate and method for treating substrate
SEMES CO LTD1 citations56
US11887870B2Jan 30, 2024
Apparatus and method for supplying liquid
SEMES CO LTD0 citations54
US12278118B2Apr 15, 2025
Substrate processing apparatus and substrate processing method including processing liquid supply unit
SEMES CO LTD0 citations47