Inventor
HOFFNAGLE JOHN ALLEN
US4 patents
Patents
4 patentsUS6295168B1Sep 25, 2001
Refractive optical system that converts a laser beam to a collimated flat-top beam
IBM71 citations92
US7046342B2May 16, 2006
Apparatus for characterization of photoresist resolution, and method of use
IBM12 citations80
US7179571B2Feb 20, 2007
Apparatus for characterization of photoresist resolution, and method of use
IBM6 citations70
US6879448B2Apr 12, 2005
Apparatus for achromatizing optical beams
IBM6 citations58