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Inventor
NEUMEISTER DAVID
US
6 patents
⚠️ This page may combine multiple inventors who share the name “NEUMEISTER DAVID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MKS INSTR INC
3 patents
US9206919B2
Dec 8, 2015
Corrosion and deposition protected valve apparatus and method
MKS INSTR INC
12 citations
79
US6895178B2
May 17, 2005
Vapor delivery system
MKS INSTR INC
5 citations
57
US9200711B2
Dec 1, 2015
Method of two-stage flow control
MKS INSTR INC
0 citations
50
GU YOUFAN
2 patents
US8671987B2
Mar 18, 2014
Two-stage, slow-start valve apparatus
GU YOUFAN
7 citations
81
US8679287B2
Mar 25, 2014
Method and apparatus for preventing ALD reactants from damaging vacuum pumps
GU YOUFAN
0 citations
39
GROUT KEVIN
1 patent
US8196893B2
Jun 12, 2012
Isolation valve with corrosion protected and heat transfer enhanced valve actuator and closure apparatus and method
GROUT KEVIN
23 citations
86