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Inventor
HSU FENG-YU
TW
3 patents
⚠️ This page may combine multiple inventors who share the name “HSU FENG-YU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNITED MICROELECTRONICS CORP
2 patents
US7514347B2
Apr 7, 2009
Interconnect structure and fabricating method thereof
UNITED MICROELECTRONICS CORP
2 citations
59
US7439154B2
Oct 21, 2008
Method of fabricating interconnect structure
UNITED MICROELECTRONICS CORP
6 citations
59
CHEN WEI-CHIH
1 patent
US8084357B2
Dec 27, 2011
Method for manufacturing a dual damascene opening comprising a trench opening and a via opening
CHEN WEI-CHIH
5 citations
60