Inventor
JACOBS FRANSICUS MATHIJS
NL6 patents
⚠️ This page may combine multiple inventors who share the name “JACOBS FRANSICUS MATHIJS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
5 patentsUS7310132B2Dec 18, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV25 citations89
US7459808B2Dec 2, 2008
Lithographic apparatus and motor
ASML NETHERLANDS BV13 citations81
US7956982B2Jun 7, 2011
Apparatus for cooling
ASML NETHERLANDS BV4 citations60
US7667822B2Feb 23, 2010
Lithographic apparatus and stage apparatus
ASML NETHERLANDS BV6 citations60
US7352438B2Apr 1, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations51