P

Inventor

FITZGERALD WAYNE

US6 patents
⚠️ This page may combine multiple inventors who share the name “FITZGERALD WAYNE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

RUDOLPH TECH INC

3 patents
US11315832B2Apr 26, 2022

Wafer singulation process control

RUDOLPH TECH INC0 citations58
US10553504B2Feb 4, 2020

Inspection of substrates

RUDOLPH TECH INC0 citations44
US10466179B2Nov 5, 2019

Semiconductor device inspection of metallic discontinuities

RUDOLPH TECH INC0 citations44

ONTO INNOVATION INC

2 patents
US11126096B2Sep 21, 2021

System and method for optimizing a lithography exposure process

ONTO INNOVATION INC1 citations57
US11531279B2Dec 20, 2022

System and method for optimizing a lithography exposure process

ONTO INNOVATION INC0 citations55

SUPERCRITICAL FLUID TECHNOLOGI

1 patent
US5888050AMar 30, 1999

Precision high pressure control assembly

SUPERCRITICAL FLUID TECHNOLOGI98 citations93