Inventor
MOON JOO-TAE
KR10 patents
Patents
10 patentsUS6485895B1Nov 26, 2002
Methods for forming line patterns in semiconductor substrates
SAMSUNG ELECTRONICS CO LTD55 citations95
US6964839B1Nov 15, 2005
Photosensitive polymer having cyclic backbone and resist composition containing the same
SAMSUNG ELECTRONICS CO LTD22 citations92
US6844134B2Jan 18, 2005
Photosenseitive polymer having fluorinated ethylene glycol group and chemically amplified resist composition comprising the same
SAMSUNG ELECTRONICS CO LTD26 citations92
US6803176B2Oct 12, 2004
Methods for forming line patterns in semiconductor substrates
SAMSUNG ELECTRONICS CO LTD17 citations92
US6169009B1Jan 2, 2001
Methods of etching platinum group metal film and forming lower electrode of capacitor
SAMSUNG ELECTRONICS CO LTD25 citations91
US6284438B1Sep 4, 2001
Method for manufacturing a photoresist pattern defining a small opening and method for manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD16 citations83
US6051362AApr 18, 2000
Silicon containing polymer and chemically amplified resist composition comprising the same
SAMSUNG ELECTRONICS CO LTD12 citations73
US6245482B1Jun 12, 2001
Polymer and chemically amplified resist composition including silicon containing protecting group
SAMSUNG ELECTRONICS CO LTD2 citations62
US8013374B2Sep 6, 2011
Semiconductor memory devices including offset bit lines
SAMSUNG ELECTRONICS CO LTD2 citations61
US7547936B2Jun 16, 2009
Semiconductor memory devices including offset active regions
SAMSUNG ELECTRONICS CO LTD1 citations51