Inventor
CHUNG JEONG-HEE
KR8 patents
Patents
8 patentsUS7201943B2Apr 10, 2007
Methods of forming atomic layers of a material on a substrate by sequentially introducing precursors of the material
SAMSUNG ELECTRONICS CO LTD506 citations98
US6485895B1Nov 26, 2002
Methods for forming line patterns in semiconductor substrates
SAMSUNG ELECTRONICS CO LTD55 citations95
US6884675B2Apr 26, 2005
Semiconductor capacitors having tantalum oxide layers and methods for manufacturing the same
SAMSUNG ELECTRONICS CO LTD15 citations92
US6803176B2Oct 12, 2004
Methods for forming line patterns in semiconductor substrates
SAMSUNG ELECTRONICS CO LTD17 citations92
US6734480B2May 11, 2004
Semiconductor capacitors having tantalum oxide layers
SAMSUNG ELECTRONICS CO LTD34 citations92
US7314806B2Jan 1, 2008
Methods of forming metal-insulator-metal (MIM) capacitors with separate seed
SAMSUNG ELECTRONICS CO LTD5 citations62
US6919243B2Jul 19, 2005
Methods of forming an integrated circuit capacitor in which a metal preprocessed layer is formed on an electrode thereof
SAMSUNG ELECTRONICS CO LTD4 citations62
US6893501B2May 17, 2005
Method for manufacturing a semiconductor device having a capping layer covering a capacitor of the semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations52