Inventor

BARRISS LOUISE S

US3 patents

⚠️ This page may combine multiple inventors who share the name “BARRISS LOUISE S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

1 patent

US5421889AJun 6, 1995

Method and apparatus for inverting samples in a process

TOKYO ELECTRON LTD69 citations93

BROOKS AUTOMATION INC

1 patent

US7109509B2Sep 19, 2006

Device for the detection of substrates stacked with a specific spacing

BROOKS AUTOMATION INC10 citations70

VEECO INSTR INC

1 patent

US10718052B2Jul 21, 2020

Rotating disk reactor with ferrofluid seal for chemical vapor deposition

VEECO INSTR INC0 citations34