Inventor
KAACK TORSTEN
US6 patents
⚠️ This page may combine multiple inventors who share the name “KAACK TORSTEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
3 patentsUS8711349B2Apr 29, 2014
High throughput thin film characterization and defect detection
KLA TENCOR CORP8 citations80
US9553033B2Jan 24, 2017
Semiconductor device models including re-usable sub-structures
KLA TENCOR CORP2 citations68
US10088413B2Oct 2, 2018
Spectral matching based calibration
KLA TENCOR CORP1 citations44