Inventor

YOO SUNGCHUL

US4 patents

⚠️ This page may combine multiple inventors who share the name “YOO SUNGCHUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

2 patents

US9412673B2Aug 9, 2016

Multi-model metrology

KLA TENCOR CORP10 citations83

US9311431B2Apr 12, 2016

Secondary target design for optical measurements

KLA TENCOR CORP5 citations69

KLA TENCOR TECH CORP

1 patent

US7349079B2Mar 25, 2008

Methods for measurement or analysis of a nitrogen concentration of a specimen

KLA TENCOR TECH CORP37 citations90

KLA CORP

1 patent

US11990380B2May 21, 2024

Methods and systems for combining x-ray metrology data sets to improve parameter estimation

KLA CORP0 citations48