Inventor
HUH NO-HYUN
KR5 patents
Patents
5 patentsUS7560712B2Jul 14, 2009
Ion implanter with etch prevention member(s)
SAMSUNG ELECTRONICS CO LTD13 citations80
US8361274B2Jan 29, 2013
Etching apparatus and etching method
SAMSUNG ELECTRONICS CO LTD6 citations70
US7497963B2Mar 3, 2009
Etching method
SAMSUNG ELECTRONICS CO LTD7 citations70
US6835276B2Dec 28, 2004
Window for allowing end point of etching process to be detected and etching device comprising the same
SAMSUNG ELECTRONICS CO LTD2 citations60
US6114237ASep 5, 2000
Method of forming contacts for a semiconductor device
SAMSUNG ELECTRONICS CO LTD1 citations48