Inventor

IM TAE-SUB

KR2 patents

Patents

2 patents

US7560712B2Jul 14, 2009

Ion implanter with etch prevention member(s)

SAMSUNG ELECTRONICS CO LTD13 citations80

US7112810B2Sep 26, 2006

Ion implanting apparatus and ion implanting method using the same

SAMSUNG ELECTRONICS CO LTD1 citations47