Inventor
LEE SUNGHIL
KR9 patents
⚠️ This page may combine multiple inventors who share the name “LEE SUNGHIL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS12432901B2Sep 30, 2025
Technologies for fabricating a vertical DRAM structure
TOKYO ELECTRON LTD0 citations61
US11387139B2Jul 12, 2022
Method of manufacturing semiconductor device
TOKYO ELECTRON LTD0 citations61
US11139313B2Oct 5, 2021
Method of manufacturing semiconductor memory
TOKYO ELECTRON LTD1 citations60
US11069536B2Jul 20, 2021
Device manufacturing method
TOKYO ELECTRON LTD0 citations60
US12256558B2Mar 18, 2025
Technologies for fabricating a 3D memory structure
TOKYO ELECTRON LTD0 citations56
US12538560B2Jan 27, 2026
Methods for fabricating isolation structures using directional beam process
TOKYO ELECTRON LTD0 citations46