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Inventor
TJANDRA AGUS S
US
3 patents
⚠️ This page may combine multiple inventors who share the name “TJANDRA AGUS S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
2 patents
US8888916B2
Nov 18, 2014
Thermal reactor with improved gas flow distribution
APPLIED MATERIALS INC
6 citations
82
US10714333B2
Jul 14, 2020
Apparatus and method for selective oxidation at lower temperature using remote plasma source
APPLIED MATERIALS INC
0 citations
49
TJANDRA AGUS S
1 patent
US8435906B2
May 7, 2013
Methods for forming conformal oxide layers on semiconductor devices
TJANDRA AGUS S
2 citations
54