Inventor
SHIH HSUN-CHUAN
TW7 patents
⚠️ This page may combine multiple inventors who share the name “SHIH HSUN-CHUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
5 patentsUS10061193B2Aug 28, 2018
Focused radiation beam induced deposition
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US9915866B2Mar 13, 2018
Focused radiation beam induced deposition
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US9810978B2Nov 7, 2017
Method for lithography patterning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US9759998B2Sep 12, 2017
Efficient solution for removing EUV native defects
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US9395632B2Jul 19, 2016
Efficient solution for removing EUV native defects
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48