Inventor

BUSCHE MATTHEW J

US5 patents

⚠️ This page may combine multiple inventors who share the name “BUSCHE MATTHEW J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

3 patents

US9831111B2Nov 28, 2017

Apparatus and method for measurement of the thermal performance of an electrostatic wafer chuck

APPLIED MATERIALS INC13 citations83

US10395964B2Aug 27, 2019

Apparatus and method for measurement of the thermal performance of an electrostatic wafer chuck

APPLIED MATERIALS INC1 citations61

US10121688B2Nov 6, 2018

Electrostatic chuck with external flow adjustments for improved temperature distribution

APPLIED MATERIALS INC1 citations51

BUSCHE MATTHEW J

1 patent

US9622375B2Apr 11, 2017

Electrostatic chuck with external flow adjustments for improved temperature distribution

BUSCHE MATTHEW J5 citations78

PARKHE VIJAY D

1 patent

US9520315B2Dec 13, 2016

Electrostatic chuck with internal flow adjustments for improved temperature distribution

PARKHE VIJAY D3 citations71