Inventor
BIRKNER ANDREAS
DE13 patents
⚠️ This page may combine multiple inventors who share the name “BIRKNER ANDREAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LEICA MICROSYSTEMS
5 patentsUS6962471B2Nov 8, 2005
Substrate conveying module and system made up of substrate conveying module and workstation
LEICA MICROSYSTEMS44 citations90
US7028565B2Apr 18, 2006
Method and arrangement for transporting and inspecting semiconductor substrates
LEICA MICROSYSTEMS6 citations71
US6553850B2Apr 29, 2003
Method and arrangement for transporting and inspecting semiconductor substrates
LEICA MICROSYSTEMS1 citations60
US6845174B2Jan 18, 2005
Arrangement and method for the identification of substrates
LEICA MICROSYSTEMS4 citations57
US6789436B2Sep 14, 2004
Method and arrangement for transporting and inspecting semiconductor substrates
LEICA MICROSYSTEMS0 citations49
INTEGRATED DYNAMICS ENG GMBH
3 patentsUS10322919B2Jun 18, 2019
Maintenance apparatus
INTEGRATED DYNAMICS ENG GMBH2 citations66
US12444634B2Oct 14, 2025
Device and method for imaging an object in at least two views
INTEGRATED DYNAMICS ENG GMBH0 citations52
US12063745B2Aug 13, 2024
Method for processing substrates, in particular wafers, masks or flat panel displays, with a semi-conductor industry machine
INTEGRATED DYNAMICS ENG GMBH0 citations51