Inventor
IKEDO YOZO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “IKEDO YOZO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
5 patentsUSD864134SOct 22, 2019
Susceptor
ASM IP HOLDING BV334 citations96
USD829306SSep 25, 2018
Shower plate
ASM IP HOLDING BV296 citations96
US10435789B2Oct 8, 2019
Substrate treatment apparatus
ASM IP HOLDING BV4 citations70
US10526704B2Jan 7, 2020
Film forming apparatus
ASM IP HOLDING BV1 citations60
US11639548B2May 2, 2023
Film-forming material mixed-gas forming device and film forming device
ASM IP HOLDING BV0 citations40