Inventor

LAHNE BERNDT

DE5 patents

⚠️ This page may combine multiple inventors who share the name “LAHNE BERNDT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

JENOPTIK JENA GMBH

3 patents

US5605428AFeb 25, 1997

Device for indexing magazine compartments and wafer-shaped objects in the compartments

JENOPTIK JENA GMBH45 citations91

US5642978AJul 1, 1997

Device for handling disk-shaped objects in a handling plane of a local clean room

JENOPTIK JENA GMBH23 citations89

US5807062ASep 15, 1998

Arrangement for handling wafer-shaped objects

JENOPTIK JENA GMBH34 citations88

JENOPTIK TECHNOLOGIE GMBH

1 patent

US5655869AAug 12, 1997

Device for coupling loading and unloading devices with semiconductor processing machines

JENOPTIK TECHNOLOGIE GMBH69 citations92

BROOKS AUTOMATION INC

1 patent

US7109509B2Sep 19, 2006

Device for the detection of substrates stacked with a specific spacing

BROOKS AUTOMATION INC10 citations70