Inventor

TUGAL HALIL

US3 patents

Patents

3 patents

US4862697ASep 5, 1989

Cryopump with vibration isolation

HELIX TECH CORP37 citations88

US4833899AMay 30, 1989

Cryopump with vibration isolation

HELIX TECH CORP27 citations88

US4835972AJun 6, 1989

Flex-line vibration isolator and cryopump with vibration isolation

HELIX TECH CORP20 citations80