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Inventor
TRUEIRA FRANK R
US
2 patents
Patents
2 patents
US5523652A
Jun 4, 1996
Microwave energized ion source for ion implantation
EATON CORP
53 citations
90
US5420415A
May 30, 1995
Structure for alignment of an ion source aperture with a predetermined ion beam path
EATON CORP
60 citations
90