Inventor

LAVALLEE ERIC

CA6 patents

⚠️ This page may combine multiple inventors who share the name “LAVALLEE ERIC”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

QUANTISCRIPT INC

3 patents

US6261938B1Jul 17, 2001

Fabrication of sub-micron etch-resistant metal/semiconductor structures using resistless electron beam lithography

QUANTISCRIPT INC52 citations89

US6897140B2May 24, 2005

Fabrication of structures of metal/semiconductor compound by X-ray/EUV projection lithography

QUANTISCRIPT INC8 citations71

US6855646B2Feb 15, 2005

Plasma polymerized electron beam resist

QUANTISCRIPT INC4 citations56

UNIV SHERBROOKE

2 patents

US6514877B1Feb 4, 2003

Method using sub-micron silicide structures formed by direct-write electron beam lithography for fabricating masks for extreme ultra-violet and deep ultra-violet lithography

UNIV SHERBROOKE9 citations72

US5918143AJun 29, 1999

Fabrication of sub-micron silicide structures on silicon using resistless electron beam lithography

UNIV SHERBROOKE15 citations72

(unassigned)

1 patent

US6777167B2Aug 17, 2004

Method of producing an etch-resistant polymer structure using electron beam lithography