Inventor · disambiguated record
Jacques Beauvais
Also filed as: BEAUVAIS JACQUES
8 granted patents·155 citations·filing 1997–2023
86Inventor score
Top patents by PatentIndex Score
8 records- 0189US8943897B2Carbon nanotubes based sensing elements and system for monitoring and mapping force, strain and stressBEAUVAIS JACQUES·Filed 2010·Granted Feb 3, 2015·67 cites·20 claims
- 0280US6261938B1Fabrication of sub-micron etch-resistant metal/semiconductor structures using resistless electron beam lithographyQUANTISCRIPT INC·Filed 1998·Granted Jul 17, 2001·52 cites·38 claims
- 0365US6514877B1Method using sub-micron silicide structures formed by direct-write electron beam lithography for fabricating masks for extreme ultra-violet and deep ultra-violet lithographyUNIV SHERBROOKE·Filed 2000·Granted Feb 4, 2003·9 cites·3 claims
- 0458US6897140B2Fabrication of structures of metal/semiconductor compound by X-ray/EUV projection lithographyQUANTISCRIPT INC·Filed 2001·Granted May 24, 2005·8 cites·22 claims
- 0552US5918143AFabrication of sub-micron silicide structures on silicon using resistless electron beam lithographyUNIV SHERBROOKE·Filed 1997·Granted Jun 29, 1999·15 cites·21 claims
- 0647US6855646B2Plasma polymerized electron beam resistQUANTISCRIPT INC·Filed 2002·Granted Feb 15, 2005·4 cites·29 claims
- 0746US12429971B2Soft phasic electronic tactile sensing elements for characterization of touchSOCPRA SCIENCES ET GENIE SEC·Filed 2023·Granted Sep 30, 2025·0 cites·20 claims
- 0829US6777167B2Method of producing an etch-resistant polymer structure using electron beam lithographyFiled 2002·Granted Aug 17, 2004·0 cites·9 claims
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