Inventor
SCHULTZ KLAUS
DE12 patents
⚠️ This page may combine multiple inventors who share the name “SCHULTZ KLAUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
JENOPTIK JENA GMBH
5 patentsUS5605428AFeb 25, 1997
Device for indexing magazine compartments and wafer-shaped objects in the compartments
JENOPTIK JENA GMBH45 citations91
US5642978AJul 1, 1997
Device for handling disk-shaped objects in a handling plane of a local clean room
JENOPTIK JENA GMBH23 citations89
US5807062ASep 15, 1998
Arrangement for handling wafer-shaped objects
JENOPTIK JENA GMBH34 citations88
US6419439B2Jul 16, 2002
Indexer for magazine shelves of a magazine and wafer-shaped objects contained therein
JENOPTIK JENA GMBH16 citations79
US5814116ASep 29, 1998
Arrangement for generating a purified, low-turbulence air flow for supplying local clean rooms
JENOPTIK JENA GMBH7 citations73
BROOKS AUTOMATION GMBH
3 patentsUS6641348B1Nov 4, 2003
Docking station for substrate transport containers
BROOKS AUTOMATION GMBH27 citations90
US6099059AAug 8, 2000
Device for the transfer of an object between at least two locations
BROOKS AUTOMATION GMBH20 citations86
US6211514B1Apr 3, 2001
Device and method for sensing wafer-shaped objects and shelves in a container
BROOKS AUTOMATION GMBH14 citations66