P

Inventor

OKADA KIMIHIRO

JP6 patents
⚠️ This page may combine multiple inventors who share the name “OKADA KIMIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HOYA CORP

4 patents
US5942356AAug 24, 1999

Phase shift mask and phase shift mask blank

HOYA CORP56 citations94
US6242138B1Jun 5, 2001

Phase shift mask and phase shift mask blank

HOYA CORP8 citations72
US6153341ANov 28, 2000

Phase shift mask and phase shift mask blank

HOYA CORP11 citations72
US6475681B2Nov 5, 2002

Phase shift mask and phase shift mask blank

HOYA CORP3 citations61

SHINETSU CHEMICAL CO

2 patents
US7556892B2Jul 7, 2009

Halftone phase shift mask blank, halftone phase shift mask, and pattern transfer method

SHINETSU CHEMICAL CO3 citations62
US7598004B2Oct 6, 2009

Film-depositing target and preparation of phase shift mask blank

SHINETSU CHEMICAL CO0 citations51