Inventor
LAKKAPRAGADA SURESH
US4 patents
Patents
4 patentsUS6987572B2Jan 17, 2006
Methods and systems for lithography process control
KLA TENCOR TECH CORP143 citations97
US6689519B2Feb 10, 2004
Methods and systems for lithography process control
KLA TENCOR TECH CORP75 citations96
US7767956B2Aug 3, 2010
Methods and systems for lithography process control
KLA TENCOR TECH CORP1 citations61
US7462814B2Dec 9, 2008
Methods and systems for lithography process control
KLA TENCOR TECH CORP1 citations61