Inventor
HANKINSON MATT
US6 patents
⚠️ This page may combine multiple inventors who share the name “HANKINSON MATT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR TECH CORP
5 patentsUS7352453B2Apr 1, 2008
Method for process optimization and control by comparison between 2 or more measured scatterometry signals
KLA TENCOR TECH CORP56 citations97
US6987572B2Jan 17, 2006
Methods and systems for lithography process control
KLA TENCOR TECH CORP143 citations97
US6689519B2Feb 10, 2004
Methods and systems for lithography process control
KLA TENCOR TECH CORP75 citations96
US7767956B2Aug 3, 2010
Methods and systems for lithography process control
KLA TENCOR TECH CORP1 citations61
US7462814B2Dec 9, 2008
Methods and systems for lithography process control
KLA TENCOR TECH CORP1 citations61