Inventor
AKAIKE YUTAKA
JP16 patents
⚠️ This page may combine multiple inventors who share the name “AKAIKE YUTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
12 patentsUS6634245B1Oct 21, 2003
Drivingly rotatable mechanism of specimen loading table and specimen loading mechanism
TOKYO ELECTRON LTD19 citations92
US6317647B1Nov 13, 2001
Aligner
TOKYO ELECTRON LTD23 citations91
US5912555AJun 15, 1999
Probe apparatus
TOKYO ELECTRON LTD17 citations91
US6307390B1Oct 23, 2001
Aligner and method for inspecting semiconductor wafer using shell
TOKYO ELECTRON LTD17 citations82
US6262570B1Jul 17, 2001
Probe apparatus
TOKYO ELECTRON LTD6 citations72
US11226366B2Jan 18, 2022
Wafer inspection device and maintenance method for same
TOKYO ELECTRON LTD0 citations62
US7580109B2Aug 25, 2009
Substrate supporting unit, and substrate temperature control apparatus and method
TOKYO ELECTRON LTD3 citations62
US7812627B2Oct 12, 2010
Test device
TOKYO ELECTRON LTD5 citations61
US11776829B2Oct 3, 2023
Dummy wafer
TOKYO ELECTRON LTD0 citations57
US11543445B2Jan 3, 2023
Inspection apparatus
TOKYO ELECTRON LTD0 citations52
US9885747B2Feb 6, 2018
Substrate inspection apparatus and substrate temperature control method
TOKYO ELECTRON LTD0 citations41
US7994809B2Aug 9, 2011
Transfer mechanism for target object to be inspected
TOKYO ELECTRON LTD0 citations41