Inventor
KATO YOSHIYASU
JP6 patents
⚠️ This page may combine multiple inventors who share the name “KATO YOSHIYASU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUS7411384B2Aug 12, 2008
Wafer chuck
TOKYO ELECTRON LTD9 citations80
US9638719B2May 2, 2017
Probe device having cleaning mechanism for cleaning connection conductor
TOKYO ELECTRON LTD2 citations70
US9759762B2Sep 12, 2017
Probe device
TOKYO ELECTRON LTD2 citations69
US11776829B2Oct 3, 2023
Dummy wafer
TOKYO ELECTRON LTD0 citations57
US9261553B2Feb 16, 2016
Probe apparatus
TOKYO ELECTRON LTD0 citations39